Oxidized Silicon-On-Insulator (OxSOI) from Bulk Silicon: a New Photonic Platform

被引：0
|
作者：
Sherwood-Droz, Nicolas [1 ]
Gondarenko, Alexander [1 ]
Lipson, Michal [1 ]
机构：
[1] Cornell Univ, Sch Elect & Comp Engn, Ithaca, NY 14853 USA
来源：
2010 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) AND QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (QELS) | 2010年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We demonstrate a bulk silicon alternative to SOI, using Si(3)N(4) masking and oxidation techniques. We show waveguide losses of 2.92 dB/cm with a process compatible with the front-end of a typical CMOS fabrication line. (C)2010 Optical Society of America
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