Modeling microwave behaviors of series cantilever MEMS switch

被引：1
|
作者：
Peng, B [1 ]
Zhang, WL [1 ]
Chen, GH [1 ]
Zhang, WX [1 ]
Jiang, HC [1 ]
机构：
[1] Univ Elect Sci & Technol China, Sch Microelect & Solid State Elect, Chengdu 610054, Peoples R China
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2006年 / 125卷 / 02期
关键词：
microwave switch; microwave behavior; circuit model; MEMS;
D O I：
10.1016/j.sna.2005.07.004
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Simple and effective model is demanded which enables the design and structural optimization of the microwave MEMS switch efficiently. For this purpose the microwave behaviors of series metal cantilever MEMS switch have been modeled by "simple" circuit in this paper. The microwave characteristics have been calculated and compared with the experiment data based on the developed model. The results show that the microwave characteristics of series metal cantilever MEMS switch can be described very well with this model. Based on this model, the influences of the structural parameters of the switch on the microwave characteristics have been discussed extensively. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：471 / 476
页数：6
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