A cantilever type MEMS switch with enhanced contact force: the first results

被引：0

作者：

Belozerov, I. A. ^{[1
,2
]}

Uvarov, I. V. ^{[1
]}

机构：

[1] RAS, Yaroslavl Branch, Valiev Inst Phys & Technol, Yaroslavl, Russia

[2] PG Demidov Yaroslavl State Univ, Yaroslavl, Russia

来源：

ST PETERSBURG POLYTECHNIC UNIVERSITY JOURNAL-PHYSICS AND MATHEMATICS | 2023年 / 16卷 / 03期

关键词：

MEMS switch; cantilever; contact force; contact resistance; pull-in voltage;

D O I：

10.18721/JPM.163.178

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

igas2580@yandex.ru Abstract. MEMS switches are of particular interest for advanced radio electronic systems, but their application is limited by the lack of reliability. The switch develops low contact force, which leads to high and unstable contact resistance. The force is typically increased by using complex shaped and large area electrodes, while a simple and compact design is more prefera-ble. This work presents a switch based on a miniature cantilever. The contact force is enhanced by selecting the vertical dimensions of the structure. The trial samples are fabricated and tested. Their performance is compared with theoretical predictions.

引用

页码：428 / 433

页数：6

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