Optimization of Cantilever-Based MEMS Switch

被引：0
|
作者：
Vakilian, Mohammadmahdi [1 ]
Mousavi, Maryam [1 ]
Bais, Badariah [1 ]
Majlis, Burhanuddin Yeop [1 ]
机构：
[1] UKM, Inst Microengn & Nanoelect IMEN, Ukm Bangi 43600, Selangor, Malaysia
来源：
2012 10TH IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS (ICSE) | 2012年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, RF MEMS switches were studied. One of the applications of RF MEMS switches is in the reconfigurable antenna where it is used to replace the traditional switches such as FET and PIN switches. Among the RF MEMS switches, the cantilever-based MEMS switch is the most popular for its low cost and ease of the fabrication process. The 3D builder and Thermo-Electro-Mechanical (TEM) modules of the IntelliSuite software were used for the simulation of the cantilever-based MEMS switch. The effect of materials and beam geometry of the switch on the pull in voltage and the operating frequency were discussed. The simulation results showed that there is a trade-off between the pull in voltage and the operating frequency for optimizing the cantilever-based MEMS switch.
引用
收藏
页码：168 / 172
页数：5
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