Modeling and design aspects of the MEMS switch

被引：2
|
作者：
Simion, S [1 ]
机构：
[1] Mil Tech Acad, Bucharest 75275, Romania
来源：
2003 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, PROCEEDINGS | 2003年
关键词：
D O I：
10.1109/SMICND.2003.1251360
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, some aspects regarding the mechanical as well as electrical modeling of the MEMS switch, are presented. A general formula for the spring constant is proposed, in order to take into consideration the real distribution of the electrostatic force along the bridge MEMS. This formula may be used for a better mechanical analyze, but also for a better electrical analyze of the MEMS switch. The influence of the value for the applied voltage on the MEMS bridge is also numerically analyzed, for two geometries of the device. Also, a numerically analyze of a switch consisting of an array of MEMS switch is also presented, in order to estimate the effect of the MEMS switch series inductance.
引用
收藏
页码：125 / 128
页数：4
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