Modeling and design aspects of the MEMS switch

被引：2
|
作者：
Simion, S [1 ]
机构：
[1] Mil Tech Acad, Bucharest 75275, Romania
来源：
2003 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, PROCEEDINGS | 2003年
关键词：
D O I：
10.1109/SMICND.2003.1251360
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, some aspects regarding the mechanical as well as electrical modeling of the MEMS switch, are presented. A general formula for the spring constant is proposed, in order to take into consideration the real distribution of the electrostatic force along the bridge MEMS. This formula may be used for a better mechanical analyze, but also for a better electrical analyze of the MEMS switch. The influence of the value for the applied voltage on the MEMS bridge is also numerically analyzed, for two geometries of the device. Also, a numerically analyze of a switch consisting of an array of MEMS switch is also presented, in order to estimate the effect of the MEMS switch series inductance.
引用
收藏
页码：125 / 128
页数：4
相关论文
共 50 条
  • [31] Design, performance and qualification of a commercially available MEMS switch
    McKillop, John
    Fowler, Thomas
    Goins, David
    Nelson, Richard
    2006 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-4, 2006, : 1781 - +
  • [32] Thermal characterization of RF MEMS relay switch design
    Pryputniewicz, RJ
    Machate, MS
    Rosato, DA
    Furlong, C
    2003 INTERNATIONAL SYMPOSIUM ON MICROELECTRONICS, 2003, 5288 : 593 - 598
  • [33] Design and of analysis of SPDT Ohmic RF MEMS switch
    K. Srinivasa Rao
    K. Vasantha
    P. Ashok Kumar
    Koushik Guha
    K. Girija Sravani
    Microsystem Technologies, 2020, 26 : 2381 - 2387
  • [34] Material Selection Methodology for RF MEMS Switch Design
    Belevtsev, Andrey M.
    Epaneshnikova, Irina K.
    Dryagin, Ivan O.
    Kryuchkov, Vasily L.
    Lukichev, Vladimir F.
    Boldyreff, Anton S.
    SPIE FUTURE SENSING TECHNOLOGIES 2021, 2021, 11914
  • [35] Design, Simulation and Analysis of a Slotted RF MEMS Switch
    Sai Pranav Chokkara
    Anurag Gaur
    K. Girija Sravani
    B. Balaji
    K. Srinivasa Rao
    Transactions on Electrical and Electronic Materials, 2022, 23 : 419 - 429
  • [36] Method to Design and Fabricate a Novel RF MEMS switch
    Zhang, Naibo
    Mei, Lirong
    MICRO-NANO TECHNOLOGY XV, 2014, 609-610 : 784 - +
  • [37] Design of low actuation voltage RF MEMS switch
    Pacheco, SP
    Katehi, LPB
    Nguyen, CTC
    2000 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 2000, : 165 - 168
  • [38] Scalable RF MEMS Switch Matrices: Methodology and Design
    Chan, King Yuk
    Daneshmand, Mojgan
    Mansour, Raafat R.
    Ramer, Rodica
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2009, 57 (06) : 1612 - 1621
  • [39] Design of vertical packaging technology for RF MEMS switch
    Bansal, Deepak
    Sharma, Akshdeep
    Kaur, Maninder
    Rangra, K. J.
    16TH INTERNATIONAL WORKSHOP ON PHYSICS OF SEMICONDUCTOR DEVICES, 2012, 8549
  • [40] Design, Simulation and Analysis of a Slotted RF MEMS Switch
    Chokkara, Sai Pranav
    Gaur, Anurag
    Sravani, K. Girija
    Balaji, B.
    Rao, K. Srinivasa
    TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS, 2022, 23 (04) : 419 - 429
12345