A Mode-localized Accelerometer based on Three Degree-of-freedom Weakly Coupled Resonator

被引：0
|
作者：
Kang, Hao [1 ]
Yang, Jing [1 ]
Zhong, Jiming [1 ]
Zhang, Heming [1 ]
Chang, Honglong [1 ]
机构：
[1] Northwestern Polytech Univ, Minist Educ, Key Lab Micro & Nano Syst Aerosp, Xian, Shaanxi, Peoples R China
来源：
2017 IEEE SENSORS | 2017年
基金：
中国国家自然科学基金;
关键词：
resonant accelerometer; mode localization; three degree-of-freedom; weakly coupled resonator;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports a micromachined accelerometer using a three degree-of-freedom (3-DoF) weakly coupled resonator (WCR) based on the phenomenon of mode localization. When acceleration acts on the proof masses, the stiffness imbalance between the two outer resonators will incur the mode localization and cause the shift of amplitude ratio. The measured amplitude ratio sensitivity of 7,263,30 ppm/g is 726 times higher than the frequency sensitivity of 10,00 ppm/g. Furthermore, the sensitivity of the 3-DoF WCR accelerometer is improved by 349% compared with the 2-DoF WCR accelerometer.
引用
收藏
页码：567 / 569
页数：3
相关论文
共 50 条
  • [41] Three degree-of-freedom control of an electrostatically suspended disk
    Pyle, Kenneth E.
    M'Closkey, Robert T.
    MECHATRONICS, 2025, 106
  • [42] Compact fiber-coupled three degree-of-freedom displacement interferometry for nanopositioning stage calibration
    Gillmer, S. R.
    Smith, R. C. G.
    Woody, S. C.
    Ellis, J. D.
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2014, 25 (07)
  • [43] A NOVEL MICROMECHANICAL MODE-LOCALIZED RESONATOR UTILIZING ANTI-RESONATING STRUCTURES
    Liu, Jia-Ren
    Lo, Yu-Cheng
    Li, Wei-Chang
    2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2019, : 214 - 217
  • [44] A High-Performance Mode-Localized Accelerometer Employing a Quasi-Rigid Coupler
    Zhang, Hemin
    Sobreviela, Guillermo
    Chen, Dongyang
    Pandit, Milind
    Sun, Jiangkun
    Zhao, Chun
    Seshia, Ashwin
    IEEE ELECTRON DEVICE LETTERS, 2020, 41 (10) : 1560 - 1563
  • [45] Mode-localized sensing in micro-and nano-mechanical resonator arrays
    Seshia, Ashwin A.
    2016 IEEE SENSORS, 2016,
  • [46] Localization in Coupled Systems: Part IV - Geometric Manufacturing Errors in A Mode-localized Three Cantilever Array
    Zhang, Ye
    Yang, Jian
    Zhou, Di
    Liu, Shuyi
    Wang, Dong F.
    Itoh, Toshihiro
    Maeda, Ryutaro
    2022 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS, DTIP, 2022,
  • [47] A Mode-localized Resonant Accelerometer Based on A Novel Micro-lever Coupler Resistant to Manufacture Process Defects
    Wang, Bowen
    Wang, Kunfeng
    Wang, Zheng
    Xiong, Xinyin
    Zhai, Zhaoyang
    Yang, Wuhao
    Zou, Xudong
    2024 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, INERTIAL, 2024,
  • [48] Limits to mode-localized sensing using micro- and nanomechanical resonator arrays
    Thiruvenkatanathan, P.
    Woodhouse, J.
    Yan, J.
    Seshia, A. A.
    JOURNAL OF APPLIED PHYSICS, 2011, 109 (10)
  • [49] ENHANCING SENSITIVITY OF MODE-LOCALIZED ACCELEROMETERS USING ASYMMETRICAL COUPLED RESONATORS
    Wang, Zheng
    Xiong, XingYin
    Wang, KunFeng
    Yang, Wuhao
    Bie, XiaoRui
    Li, ZhiTian
    Zou, XuDong
    2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, 2024, : 907 - 910
  • [50] Control of a Three Degree-Of-Freedom Motion Platform with a Real Vehicle
    Martinez-Maradiaga, Daniel
    Raci, Edonis
    Lueoend, Matthias
    Meixner, Gerrit
    IFAC PAPERSONLINE, 2019, 52 (19): : 7 - 12
12345