A Mode-localized Accelerometer based on Three Degree-of-freedom Weakly Coupled Resonator

被引：0
|
作者：
Kang, Hao [1 ]
Yang, Jing [1 ]
Zhong, Jiming [1 ]
Zhang, Heming [1 ]
Chang, Honglong [1 ]
机构：
[1] Northwestern Polytech Univ, Minist Educ, Key Lab Micro & Nano Syst Aerosp, Xian, Shaanxi, Peoples R China
来源：
2017 IEEE SENSORS | 2017年
基金：
中国国家自然科学基金;
关键词：
resonant accelerometer; mode localization; three degree-of-freedom; weakly coupled resonator;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports a micromachined accelerometer using a three degree-of-freedom (3-DoF) weakly coupled resonator (WCR) based on the phenomenon of mode localization. When acceleration acts on the proof masses, the stiffness imbalance between the two outer resonators will incur the mode localization and cause the shift of amplitude ratio. The measured amplitude ratio sensitivity of 7,263,30 ppm/g is 726 times higher than the frequency sensitivity of 10,00 ppm/g. Furthermore, the sensitivity of the 3-DoF WCR accelerometer is improved by 349% compared with the 2-DoF WCR accelerometer.
引用
收藏
页码：567 / 569
页数：3
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