A Mode-localized Resonant Accelerometer Based on A Novel Micro-lever Coupler Resistant to Manufacture Process Defects

被引：0
|
作者：
Wang, Bowen [1 ,2 ]
Wang, Kunfeng [1 ,2 ]
Wang, Zheng [3 ]
Xiong, Xinyin [1 ]
Zhai, Zhaoyang [1 ,2 ]
Yang, Wuhao [1 ]
Zou, Xudong [1 ,2 ,3 ]
机构：
[1] Chinese Acad Sci, Aerosp Informat Res Inst, State Key Lab Transducer Technol, Beijing, Peoples R China
[2] Univ Chinese Acad Sci, Sch Elect Elect & Commun Engn, Beijing, Peoples R China
[3] QiLu Aerosp Informat Res Inst, Jinan, Peoples R China
来源：
2024 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, INERTIAL | 2024年
关键词：
mode-localized; accelerometer; coupler; manufacture process defects;
D O I：
10.1109/INERTIAL60399.2024.10502031
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The mode-localized resonant accelerometer (MLRXL) described in this study is developed with a unique micro-level mechanical coupling mechanism that protects it from manufacturing process defects and ensures that the coupling stiffness of fabrication is the same as desired value.
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页数：4
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