Sample geometry effect on mechanical property of gold micro-cantilevers by micro-bending test

被引：4

作者：

Suzuki, Kosuke ^{[1
]}

Chang, Tso-Fu Mark ^{[1
]}

Hashigata, Ken ^{[1
]}

Asano, Keisuke ^{[1
]}

Chen, Chun-Yi ^{[1
]}

Nagoshi, Takashi ^{[2
]}

Yamane, Daisuke ^{[1
]}

Ito, Hiroyuki ^{[1
]}

Machida, Katsuyuki ^{[1
]}

Masu, Kazuya ^{[1
]}

Sone, Masato ^{[1
]}

机构：

[1] Tokyo Inst Technol, Inst Innovat Res, Yokohama, Kanagawa 2268503, Japan

[2] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058560, Japan

来源：

MRS COMMUNICATIONS | 2020年 / 10卷 / 03期

关键词：

TENSILE BEHAVIOR; FILMS; PLASTICITY; COPPER; NICKEL;

D O I：

10.1557/mrc.2020.38

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Sample geometry effects on mechanical strengths of gold micro-cantilevers are evaluated by a micro-bending test. Six micro-cantilevers with the same length of 50 mu m are prepared, and the width and the thickness are varied to examine individual effects on the yield stress. The yield stress increases from 428 to 519 MPa when the thickness decreases from 11.1 to 6.0 mu m. No obvious dependency is observed when varying the width. The results reveal that the thickness and the width each has a different influence on the yield stresses of micro-cantilevers evaluated by the bending test, which is the sample geometry effect.

引用

页码：434 / 438

页数：5

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