Innovations at 7nm to keep Moore's Law alive

被引：0
|
作者：
Lammers, David
机构：
来源：
SOLID STATE TECHNOLOGY | 2017年 / 60卷 / 01期
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
EUV, cobalt contacts, are expected to be introduced at the 7nm node by several semiconductor manufacturers
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页码：16 / 18
页数：3
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