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- [31] NF3 added oxidation of 4H-SiC(0001) and Suppression of Interface Degradation SILICON CARBIDE AND RELATED MATERIALS 2013, PTS 1 AND 2, 2014, 778-780 : 619 - 622
- [32] LOW-TEMPERATURE OXIDATION OF SN FILM BY NF3/O2 PLASMA YOGYO-KYOKAI-SHI, 1987, 95 (06): : 569 - 572
- [33] A Study on the NF3 Plasma Etching Reaction with Cobalt Oxide Grown on Inconel Base Metal Surface Plasma Chemistry and Plasma Processing, 2019, 39 : 1145 - 1159
- [36] Surface analysis of yttrium oxyfluoride deposited via air plasma spraying for Erosion resistance against NF3 plasma Journal of the Korean Ceramic Society, 2024, 61 : 63 - 70
- [38] NF3 decomposition in the absence of water over some metal oxides coated-Al2O3 reagents JOURNAL OF ENVIRONMENTAL CHEMICAL ENGINEERING, 2019, 7 (03):
- [39] Fluorination under NF3 Flow of Oxygen Deficient YBa2Cu3Ox Thin Films Deposited on Various Types of Substrate Acta Physica Polonica A, 92 (01):