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- [22] ENHANCEMENT OF THE SUPERCONDUCTING PROPERTIES OF YBA2CU3OX BY ACTUAL FLUORINATION UNDER NF3 GAS EUROPHYSICS LETTERS, 1990, 11 (02): : 181 - 187
- [23] Atomic layer etching of Al2O3 with NF3 plasma fluorination and trimethylaluminum ligand exchange JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2022, 40 (03):
- [25] Insitu cleaning of LPCVD furnaces using a thermal NF3 etch process 10TH IEEE INTERNATIONAL CONFERENCE ON ADVANCED THERMAL PROCESSING OF SEMICONDUCTORS - RTP 2002, 2002, : 195 - 195
- [28] THERMAL ELECTRON-ATTACHMENT TO NF3, PF3, AND PF5 INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1995, 149 : 111 - 121