Theory of dual-rotating polarizer and analyzer ellipsometer

被引：5
|
作者：
Gilliot, Mickael [1 ]
Naciri, Aotmane En [2 ]
机构：
[1] Univ Reims, F-51687 Reims 2, France
[2] Univ Lorraine, Inst Jean Barriol, LPC A2MC, F-57070 Metz, France
来源：
THIN SOLID FILMS | 2013年 / 540卷
关键词：
Generalized ellipsometry; Double modulation; Thin films; Anisotropy; Optical properties; Polarization; COMPENSATOR MULTICHANNEL ELLIPSOMETER; MUELLER MATRIX SPECTROSCOPY; GENERALIZED ELLIPSOMETRY; DIELECTRIC FUNCTIONS; OPTICAL FUNCTIONS; THIN-FILMS; SURFACES; REFLECTIVITY; ANISOTROPY;
D O I：
10.1016/j.tsf.2013.05.105
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Theory of a dual rotating polarizer and analyzer ellipsometer is presented in this paper. This instrument with doubly modulated optical signal is designed to perform generalized ellipsometry optical characterization of anisotropic layered systems. In this study, i) configuration of the instrument, ii) calculation of optical signal, iii) processing of the signal to extract Fourier coefficients and then generalized angles, and iv) calibration procedures are presented in details. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码：46 / 52
页数：7
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