INTEGRATING PHOTOMETRIC ROTATING ANALYZER ELLIPSOMETER WITH PRECISION ESTIMATION FROM ONE ANALYZER REVOLUTION

被引：0

作者：

WEBER, EH ^{[1
]}

机构：

[1] AKAD WISSENSCH DDR,ZENT INST ELEKR PHYS,DDR-102 BERLIN,GER DEM REP

来源：

OPTIK | 1977年 / 49卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：365 / 372

页数：8

共 50 条

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