INTEGRATING PHOTOMETRIC ROTATING ANALYZER ELLIPSOMETER WITH PRECISION ESTIMATION FROM ONE ANALYZER REVOLUTION

被引：0
|
作者：
WEBER, EH [1 ]
机构：
[1] AKAD WISSENSCH DDR,ZENT INST ELEKR PHYS,DDR-102 BERLIN,GER DEM REP
来源：
OPTIK | 1977年 / 49卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：365 / 372
页数：8
相关论文
共 50 条
  • [21] An Improvement of Scanning Ellipsometer by Rotating a Polarizer and an Analyzer at a Speed Ratio of 1:3
    El-Agez, Taher M.
    Taya, Sofyan A.
    El Tayyan, Ahmed A.
    INTERNATIONAL JOURNAL OF OPTOMECHATRONICS, 2011, 5 (01) : 51 - 67
  • [22] Calibration method of the specific characteristic of an electronic system of a rotating-analyzer ellipsometer
    Kawabata, S
    Motoki, M
    Yokota, H
    APPLIED OPTICS, 1997, 36 (10): : 2178 - 2182
  • [23] Noise Effect on Thin Film Characterization Using Rotating Polarizer Analyzer Ellipsometer
    El-Agez, T. M.
    Taya, S. A.
    ACTA PHYSICA POLONICA A, 2012, 122 (01) : 15 - 19
  • [24] Optimizing precision of rotating-analyzer and rotating-compensator-ellipsometers
    Aspnes, DE
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2004, 21 (03) : 403 - 410
  • [25] A spectroscopic ellipsometer using rotating polarizer and analyzer at a speed ratio 1:1 and a compensator
    Taya, Sofyan A.
    El-Agez, Taher M.
    Alkanoo, Anas A.
    OPTICAL AND QUANTUM ELECTRONICS, 2014, 46 (07) : 883 - 895
  • [26] A spectroscopic ellipsometer using rotating polarizer and analyzer at a speed ratio 1:1 and a compensator
    Sofyan A. Taya
    Taher M. El-Agez
    Anas A. Alkanoo
    Optical and Quantum Electronics, 2014, 46 : 883 - 895
  • [27] Observation of the initial stage of ion assisted deposition films using a rotating-analyzer ellipsometer
    Shibuya, T
    Kawabata, S
    Yoshizawa, H
    Suzuki, S
    Amano, N
    Yokota, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (08): : 4556 - 4560
  • [28] Method for Analyzing the Measurement Error with Respect to Azimuth and Incident Angle for the Rotating Polarizer Analyzer Ellipsometer
    Tu, Huatian
    Zheng, Yuxiang
    Shan, Yao
    Chen, Yao
    Zhang, Haotian
    Zhang, Rongjun
    Wang, Songyou
    Li, Jing
    Lee, YoungPak
    Chen, Liangyao
    CRYSTALS, 2021, 11 (04):
  • [29] Observation of the initial stage of ion assisted deposition films using a rotating-analyzer ellipsometer
    Shibuya, T.
    Kawabata, Sh.
    Yoshizawa, H.
    Suzuki, S.
    Amano, N.
    Yokota, H.
    1996, JJAP, Minato-ku, Japan (35):
  • [30] An extensive theoretical analysis of the 1: 2 ratio rotating polarizer-analyzer Fourier ellipsometer
    El-Agez, T. M.
    Taya, S. A.
    PHYSICA SCRIPTA, 2011, 83 (02)
12345