High-speed pattern defect detection using laser scattering

被引：0
|
作者：
Morrow, W [1 ]
Howland, R [1 ]
Trafas, B [1 ]
机构：
[1] TENCOR INSTRUMENTS,MT VIEW,CA 94043
来源：
INSTITUTE OF ENVIRONMENTAL SCIENCES 1996 PROCEEDINGS - CONTAMINATION CONTROL: SYMPOSIUM ON MINIENVIRONMENTS/42ND ANNUAL TECHNICAL MEETING - EXPANDING OUR TECHNICAL EXCELLENCE THROUGH EDUCATION | 1996年
关键词：
wafer inspection; laser scattering; contamination; planar defects; imaging methods;
D O I：
暂无
中图分类号：
TU [建筑科学];
学科分类号：
0813 ;
摘要：
引用
收藏
页码：232 / 236
页数：5
相关论文
共 50 条
  • [1] HIGH-SPEED DETECTION OF PATTERN DEFECTS USING LASER SCATTERING
    HOWLAND, RS
    WELLS, KB
    TRAFAS, BM
    SOLID STATE TECHNOLOGY, 1995, 38 (11) : 123 - &
  • [2] Defect detection during laser welding using electrical signals and high-speed photography
    Huang, Yiming
    Xu, Sai
    Yang, Lijun
    Zhao, Shengbin
    Liu, Yang
    Shi, Yansong
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2019, 271 : 394 - 403
  • [3] LASER-LIGHT-SCATTERING DETECTION FOR HIGH-SPEED COUNTERCURRENT CHROMATOGRAPHY
    SCHAUFELBERGER, DE
    MCCLOUD, TG
    BEUTLER, JA
    JOURNAL OF CHROMATOGRAPHY, 1991, 538 (01): : 87 - 90
  • [4] A high-speed particle-detection in a large area using line-laser light scattering
    Kim, Min Su
    Choi, Hyeun-Seok
    Lee, Seung Hee
    Kim, Chanjoong
    CURRENT APPLIED PHYSICS, 2015, 15 (08) : 930 - 937
  • [5] Advanced Defect Detection in High-Speed Train Wheel Treads Using Nanoelectronic Systems
    Yu, Shao-dong
    Gan, Fang-ji
    Wang, Si-yu
    JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, 2024, 19 (05) : 500 - 516
  • [6] Automatic scratching pattern detection for laboratory mice using high-speed video images
    Ishii, Idaku
    Kurozumi, Shogo
    Orito, Kensuke
    Matsuda, Hiroshi
    IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, 2008, 5 (01) : 176 - 182
  • [7] Electromagnetic Tomography System for Defect Detection of High-Speed Rail Wheel
    Miao Y.
    Liu X.
    Liu Z.
    Yue Y.
    Wu J.
    Huo J.
    Li Y.
    Journal of Beijing Institute of Technology (English Edition), 2020, 29 (04): : 474 - 483
  • [8] High-speed pattern projection for three-dimensional shape measurement using laser speckles
    Schaffer, Martin
    Grosse, Marcus
    Kowarschik, Richard
    APPLIED OPTICS, 2010, 49 (18) : 3622 - 3629
  • [9] An automation system for high-speed detection of printed matter and defect recognition
    ou, Yang
    tao, Hu
    xuan, Guo
    baoping, Guo
    2007 IEEE INTERNATIONAL CONFERENCE ON INTEGRATION TECHNOLOGY, PROCEEDINGS, 2007, : 213 - +
  • [10] An adaptive spherical image transform for high-speed fruit defect detection
    Tao, Y.
    Wen, Z.
    Transactions of the American Society of Agricultural Engineers, 1999, 42 (01): : 241 - 246
12345