High-speed pattern defect detection using laser scattering

被引：0
|
作者：
Morrow, W [1 ]
Howland, R [1 ]
Trafas, B [1 ]
机构：
[1] TENCOR INSTRUMENTS,MT VIEW,CA 94043
来源：
INSTITUTE OF ENVIRONMENTAL SCIENCES 1996 PROCEEDINGS - CONTAMINATION CONTROL: SYMPOSIUM ON MINIENVIRONMENTS/42ND ANNUAL TECHNICAL MEETING - EXPANDING OUR TECHNICAL EXCELLENCE THROUGH EDUCATION | 1996年
关键词：
wafer inspection; laser scattering; contamination; planar defects; imaging methods;
D O I：
暂无
中图分类号：
TU [建筑科学];
学科分类号：
0813 ;
摘要：
引用
收藏
页码：232 / 236
页数：5
相关论文
共 50 条
  • [11] An adaptive spherical image transform for high-speed fruit defect detection
    Tao, Y
    Wen, Z
    TRANSACTIONS OF THE ASAE, 1999, 42 (01): : 241 - 246
  • [12] Electromagnetic Tomography System for Defect Detection of High-Speed Rail Wheel
    Yu Miao
    Xianglong Liu
    Ze Liu
    Yuanli Yue
    Jianli Wu
    Jiwei Huo
    Yong Li
    Journal of Beijing Institute of Technology, 2020, 29 (04) : 474 - 483
  • [13] High-speed defect detection in rails by noncontact guided ultrasonic testing
    di Scalea, FL
    Bartoli, I
    Rizzo, P
    Fateh, M
    RAILROADS: INTERCITY RAIL PASSENGER; TRACK DESIGN AND MAINTENANCE; AND OTHER TOPICS, 2005, (1916): : 66 - 77
  • [14] Automatic detection of arbitrarily oriented fastener defect in high-speed railway
    Wu, Yunpeng
    Qin, Yong
    Qian, Yu
    Guo, Feng
    AUTOMATION IN CONSTRUCTION, 2021, 131
  • [15] A HIGH-SPEED SYSTEM FOR STABILIZATION OF THE LASER-RADIATION PATTERN AXIS
    VINOGRADOV, EG
    GLEBOVA, SN
    PAVLOV, NV
    RAZHENKOV, ET
    KVANTOVAYA ELEKTRONIKA, 1988, 15 (09): : 1839 - 1841
  • [16] Detection of High-Speed Railway Subsidence and Geometry Irregularity Using Terrestrial Laser Scanning
    Liu, Chun
    Li, Nan
    Wu, Hangbin
    Meng, Xiaolin
    JOURNAL OF SURVEYING ENGINEERING, 2014, 140 (03)
  • [17] High-speed high-resolution subsurface defect detection in ceramics using optical gating techniques.
    Bashkansky, M
    Duncan, MD
    Reintjes, J
    REVIEW OF PROGRESS IN QUANTITATIVE NONDESTRUCTIVE EVALUATION, VOLS 17A AND 17B, 1998, : 1785 - 1791
  • [18] High-speed flyer velocity measurement system based on laser scattering
    Jia, Zhexin
    Gong, Ke
    He, Shufang
    Huo, Yujing
    Zhongguo Jiguang/Chinese Journal of Lasers, 2008, 35 (07): : 1050 - 1054
  • [19] High-Speed Detection of Down Staircase for Visually Impaired People Using Illuminance of Point Pattern
    Kajiwara, Yusuke
    Ohshima, Keisuke
    Kimura, Haruhiko
    SENSORS AND MATERIALS, 2016, 28 (04) : 349 - 358
  • [20] A High-speed Adaptive Linear Equalizer with ISI Level Detection using Periodic Training Pattern
    Seo, Jin-Cheol
    Kim, Tae-Ho
    An, Taek-Joon
    Yoon, Kwan
    Kang, Jin-Ku
    2012 INTERNATIONAL SOC DESIGN CONFERENCE (ISOCC), 2012, : 419 - 422
12345