High-speed pattern defect detection using laser scattering

被引：0
|
作者：
Morrow, W [1 ]
Howland, R [1 ]
Trafas, B [1 ]
机构：
[1] TENCOR INSTRUMENTS,MT VIEW,CA 94043
来源：
INSTITUTE OF ENVIRONMENTAL SCIENCES 1996 PROCEEDINGS - CONTAMINATION CONTROL: SYMPOSIUM ON MINIENVIRONMENTS/42ND ANNUAL TECHNICAL MEETING - EXPANDING OUR TECHNICAL EXCELLENCE THROUGH EDUCATION | 1996年
关键词：
wafer inspection; laser scattering; contamination; planar defects; imaging methods;
D O I：
暂无
中图分类号：
TU [建筑科学];
学科分类号：
0813 ;
摘要：
引用
收藏
页码：232 / 236
页数：5
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