Optimizing the Design of a 2D Array Piezoelectric Micromachined Ultrasound Transducer for 3D Echo Particle Image Velocimetry

In this paper, we explored the utility of a 21) piezoelectric Micromachined Ultrasound Transducers (pMUTs) for a 3D Echo Particle Image Velocimetry (Echo PM system. The design was achieved by first examining optimal mechanical-electrical coupling coefficient (MECC) for a pMUT subsequently characterizing system performance. A combination of analytical and finite element modeling was used to accomplish the optimization. In the final design, the resonant frequency of each element was 6.0 MHz with a relative bandwidth of 120% in water. By optimizing gaps, the axial resolution and lateral resolution were respectively 0.05mm and 0.35mm in water, which is sufficient for Echo PIV system.