High-efficiency blazed diffractive optical elements for the violet wavelength fabricated by electron-beam lithography

被引：46
|
作者：
Shiono, T [1 ]
Hamamoto, T
Takahara, K
机构：
[1] Matsushita Elect Ind Co Ltd, Storage Media Syst Dev Ctr, Moriguchi, Osaka 5708501, Japan
[2] Osaka Sci & Technol Ctr, Factory Adv Opt Technol, Osaka 5941157, Japan
来源：
APPLIED OPTICS | 2002年 / 41卷 / 13期
关键词：
D O I：
10.1364/AO.41.002390
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Blazed diffractive optical elements (DOEs) were studied for the violet wavelength by electron-beam lithography. By optimizing electron-beam writing parameters and electron-dose distributions, we fabricated eight kinds of grating (period Lambda = 10-0.54 mum) with excellent blazed structure. It has been demonstrated that the measured diffraction efficiency values agreed well with the rigorous theoretical ones. For the fine period of 0.54 mum, we confirmed a peak appearance of 75.6% (TE) experimentally. A wave aberration as small as similar to0.01lambda (rms) was obtained for the first-order diffracted wave from the fabricated DOEs. Blazed DOEs for the violet wavelength could be used as key devices in a high-density optical disk pickup of the next generation. (C) 2002 Optical Society of America.
引用
收藏
页码：2390 / 2393
页数：4
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