Integration of Silicon Photonics in a Bulk CMOS Memory Flow

被引：0

作者：

Meade, Roy ^{[1
]}

Tehar-Zahav, Ofer

Sternberg, Zvi

Megged, Efraim

Sandhu, Gurtej ^{[1
]}

Orcutt, Jason S. ^{[2
]}

Ram, Rajeev ^{[2
]}

Stojanovic, Vladimir ^{[2
]}

Watts, Michael R. ^{[2
]}

Timurdogan, Erman ^{[2
]}

Shainline, Jeffrey ^{[3
]}

Popovic, Milos ^{[3
]}

机构：

[1] Micron Technol Inc, Proc R&D, Boise, ID 83706 USA

[2] MIT, Dept Elect Engn, Cambridge, MA USA

[3] Univ Colorado, Dept Elect Engn, Boulder, CO 80309 USA

来源：

2013 IEEE OPTICAL INTERCONNECTS CONFERENCE | 2013年

关键词：

bulk CMOS; optical interconnections;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Monolithically integrated silicon photonic (SiP) devices have been demonstrated using a modified bulk CMOS flow. Integration was achieved by nominally extending existing process and design collateral without shifting the CMOS parameterization.

引用

页码：114 / +

页数：2

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