Integration of Silicon Photonics in a Bulk CMOS Memory Flow

被引：0
|
作者：
Meade, Roy [1 ]
Tehar-Zahav, Ofer
Sternberg, Zvi
Megged, Efraim
Sandhu, Gurtej [1 ]
Orcutt, Jason S. [2 ]
Ram, Rajeev [2 ]
Stojanovic, Vladimir [2 ]
Watts, Michael R. [2 ]
Timurdogan, Erman [2 ]
Shainline, Jeffrey [3 ]
Popovic, Milos [3 ]
机构：
[1] Micron Technol Inc, Proc R&D, Boise, ID 83706 USA
[2] MIT, Dept Elect Engn, Cambridge, MA USA
[3] Univ Colorado, Dept Elect Engn, Boulder, CO 80309 USA
来源：
2013 IEEE OPTICAL INTERCONNECTS CONFERENCE | 2013年
关键词：
bulk CMOS; optical interconnections;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Monolithically integrated silicon photonic (SiP) devices have been demonstrated using a modified bulk CMOS flow. Integration was achieved by nominally extending existing process and design collateral without shifting the CMOS parameterization.
引用
收藏
页码：114 / +
页数：2
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