Instabilities in capacitively coupled radio-frequency discharges

被引：10
|
作者：
Schulze, Julian [1 ]
Luggenhoelscher, Dirk [1 ]
Czarnetzki, Uwe [1 ]
机构：
[1] V Ruhr Univ Bochum, Inst Expt Phys, D-44780 Bochum, Germany
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 2008年 / 36卷 / 04期
关键词：
capacitively coupled RF discharge; instabilities; plasmoids;
D O I：
10.1109/TPS.2008.923829
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
Instabilities in an asymmetric capacitively coupled radio-frequency discharge are observed at pressures above 100 Pa if a circular quartz glass tube is inserted into the discharge parallel to the powered electrode. The instabilities are observed with a charge-coupled-device camera as localized plasma balls. The number of these so-called plasmoids increases with increasing pressure. At different pressures, different modes are observed.
引用
收藏
页码：1402 / 1403
页数：2
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