Instabilities in capacitively coupled radio-frequency discharges

被引：10

作者：

Schulze, Julian ^{[1
]}

Luggenhoelscher, Dirk ^{[1
]}

Czarnetzki, Uwe ^{[1
]}

机构：

[1] V Ruhr Univ Bochum, Inst Expt Phys, D-44780 Bochum, Germany

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 2008年 / 36卷 / 04期

关键词：

capacitively coupled RF discharge; instabilities; plasmoids;

D O I：

10.1109/TPS.2008.923829

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Instabilities in an asymmetric capacitively coupled radio-frequency discharge are observed at pressures above 100 Pa if a circular quartz glass tube is inserted into the discharge parallel to the powered electrode. The instabilities are observed with a charge-coupled-device camera as localized plasma balls. The number of these so-called plasmoids increases with increasing pressure. At different pressures, different modes are observed.

引用

页码：1402 / 1403

页数：2

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