Instabilities in capacitively coupled radio-frequency discharges

被引：10
|
作者：
Schulze, Julian [1 ]
Luggenhoelscher, Dirk [1 ]
Czarnetzki, Uwe [1 ]
机构：
[1] V Ruhr Univ Bochum, Inst Expt Phys, D-44780 Bochum, Germany
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 2008年 / 36卷 / 04期
关键词：
capacitively coupled RF discharge; instabilities; plasmoids;
D O I：
10.1109/TPS.2008.923829
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
Instabilities in an asymmetric capacitively coupled radio-frequency discharge are observed at pressures above 100 Pa if a circular quartz glass tube is inserted into the discharge parallel to the powered electrode. The instabilities are observed with a charge-coupled-device camera as localized plasma balls. The number of these so-called plasmoids increases with increasing pressure. At different pressures, different modes are observed.
引用
收藏
页码：1402 / 1403
页数：2
相关论文
共 50 条
  • [31] Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C2H2 discharges
    Liu Xiang-Mei
    Li Qi-Nan
    Xu Xiang
    CHINESE PHYSICS B, 2014, 23 (08)
  • [32] Stability of two-dimensional complex plasma monolayers in asymmetric capacitively coupled radio-frequency discharges
    Couedel, L.
    Nosenko, V
    PHYSICAL REVIEW E, 2022, 105 (01)
  • [33] Different modes of capacitively coupled radio-frequency discharge in methane
    I. V. Schweigert
    Journal of Experimental and Theoretical Physics, 2004, 99 : 719 - 726
  • [34] Different modes of a capacitively coupled radio-frequency discharge in methane
    Schweigert, IV
    PHYSICAL REVIEW LETTERS, 2004, 92 (15) : 155001 - 1
  • [35] Different modes of capacitively coupled radio-frequency discharge in methane
    Schweigert, IV
    JOURNAL OF EXPERIMENTAL AND THEORETICAL PHYSICS, 2004, 99 (04) : 719 - 726
  • [36] Estimation of the methane conversion in a capacitively coupled radio-frequency plasma
    Lee, H
    Savinov, SY
    Song, HK
    Na, BK
    JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 2001, 34 (11) : 1356 - 1365
  • [37] Modeling of the nanoparticle coagulation in pulsed radio-frequency capacitively coupled C2H2 discharges
    刘相梅
    李奇楠
    李瑞
    Chinese Physics B, 2015, 24 (07) : 332 - 337
  • [38] Similarity laws for two-dimensional simulations of low-pressure capacitively coupled radio-frequency discharges
    Sun, Jing-Yu
    Schulze, Julian
    Ma, Fang-Fang
    Zhang, Quan-Zhi
    Wang, You-Nian
    PHYSICS OF PLASMAS, 2023, 30 (12)
  • [39] Modeling of the nanoparticle coagulation in pulsed radio-frequency capacitively coupled C2H2 discharges
    Liu Xiang-Mei
    Li Qi-Nan
    Li Rui
    CHINESE PHYSICS B, 2015, 24 (07)
  • [40] Electrical characteristics for capacitively coupled radio frequency discharges of helium and neon
    Tanisli, Murat
    Sahin, Neslihan
    Demir, Suleyman
    PRAMANA-JOURNAL OF PHYSICS, 2017, 89 (03):
12345