Impact of source/drain lateral straggle on GIDL current of low SS NC-FinFET

被引:0
|
作者
Maurya, Ravindra Kumar [1 ]
Kumar, Vivek [1 ]
Saha, Rajesh [1 ]
Bhowmick, Brinda [1 ]
机构
[1] NIT Silchar, Dept Elect & Commun Engn, Silchar, Assam, India
关键词
Negative capacitance FinFET; gate-induced-drain-leakage (GIDL); gaussian doping; lateral straggle (sigma); cut-off frequency (f(t)); INDUCED-DRAIN-LEAKAGE; NEGATIVE CAPACITANCE TRANSISTOR; HIGH ON-CURRENT; PERFORMANCE; MODEL; MFIS; UNDERLAP; CHARGES; SILICON; MOSFET;
D O I
10.1080/00207217.2024.2408798
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, the gate-induced drain leakage (GIDL) issue in negative capacitance (NC-FinFET) has been comprehensively addressed using Sentaurus 3-D TCAD simulations. Incorporation of ferroelectric (FE) materials in the gate stack of NC-FinFET increases with current by 12% compared to that of baseline FinFET. A steeper sub-threshold swing (SS) of 8 mV/dec is achieved at a FE-thickness of 5 nm at a lateral straggle; (sigma) = 0 nm. GIDL behaviour with respect to the variation of source/drain sigma and gate oxide thicknesses of NC-FinFET with and without the presence of the GateTunneling model is thoroughly investigated. Investigations demonstrate that in NC-FinFET, there are steeper energy band profiles near source/drain owing to coupling of fringing fields to the ferroelectric layer, which exhibits a larger and prior commencement of the longitudinal band to band tunnelling current compared to conventional FinFET. Moreover, the effect of variation of sigma on various parameters viz. SS, capacitance and transconductance has also been investigated, which shows better results for lower sigma values. At sigma = 0 nm, drain-induced barrier lowering is -187.23 mV/V as compared to that of sigma = 5 nm, which is -355.3 mV/V. Furthermore, we have also investigated drain current noise spectral density (S-ID) and gate voltage noise spectral density (S-VG) with respect to fin width (W-FIN) at the optimised sigma value.
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页数:19
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