INTEGRATING PHOTOMETRIC ROTATING ANALYZER ELLIPSOMETER WITH PRECISION ESTIMATION FROM ONE ANALYZER REVOLUTION.

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作者：
Weber, Ernst-Hinrich
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来源：
Optik (Jena) | 1977年 / 49卷 / 03期
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摘要：
A gain of sensitivity, i. e. , a possible improvement of spectral resolution and/or angle of divergence of the light beam in rotating analyzer ellipsometers (RAE) may be obtained by phase-sensitive signal detection followed by integration over definite rotation angles instead of point-like data uptake. An internal least-squares error analysis per one analyzer revolution is included allowing as well to determine the precision boundaries as to handle non-linear detectors.
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页码：365 / 372
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