INTEGRATING PHOTOMETRIC ROTATING ANALYZER ELLIPSOMETER WITH PRECISION ESTIMATION FROM ONE ANALYZER REVOLUTION.

A gain of sensitivity, i. e. , a possible improvement of spectral resolution and/or angle of divergence of the light beam in rotating analyzer ellipsometers (RAE) may be obtained by phase-sensitive signal detection followed by integration over definite rotation angles instead of point-like data uptake. An internal least-squares error analysis per one analyzer revolution is included allowing as well to determine the precision boundaries as to handle non-linear detectors.