In situ x-ray topography measurement of the growth temperature dependence of the critical thickness of epitaxial InGaAs on GaAs

被引:0
|
作者
Tanner, B.K. [1 ]
Parbrook, P.J. [2 ]
Whitehouse, C.R. [2 ]
Keir, A.M. [3 ]
Johnson, A.D. [3 ]
Jones, J. [3 ]
Wallis, D. [3 ]
Smith, L.M. [3 ]
Lunn, B. [4 ]
Hogg, J.H.C. [5 ]
机构
[1] Department of Physics, University of Durham, South Road, Durham, DH1 3LE, United Kingdom
[2] Department of Electronic and Electrical Engineering, University of Sheffield, Sheffield S1 4DU, United Kingdom
[3] DERA, St Andrews Road, Great Malvern, Worcs, WR14 3PS, United Kingdom
[4] School of Engineering, University of Hull, Cottingham Road, Hull HU6 7RX, United Kingdom
[5] Department of Physics, University of Hull, Cottingham Road, Hull HU6 7RX, United Kingdom
关键词
D O I
暂无
中图分类号
学科分类号
摘要
16
引用
收藏
相关论文
共 50 条
  • [31] X-ray reciprocal space mapping of dislocation-mediated strain relaxation during InGaAs/GaAs(001) epitaxial growth
    Sasaki, Takuo
    Suzuki, Hidetoshi
    Takahasi, Masamitu
    Ohshita, Yoshio
    Kamiya, Itaru
    Yamaguchi, Masafumi
    JOURNAL OF APPLIED PHYSICS, 2011, 110 (11)
  • [32] IN-SITU X-RAY TOPOGRAPHY STUDIES DURING THE MOLECULAR-BEAM EPITAXY GROWTH OF INGAAS ON (001) GAAS - EFFECTS OF SUBSTRATE DISLOCATION DISTRIBUTION ON STRAIN RELAXATION
    BARNETT, SJ
    KEIR, AM
    CULLIS, AG
    JOHNSON, AD
    JEFFERSON, J
    SMITH, GW
    MARTIN, T
    WHITEHOUSE, CR
    LACEY, G
    CLARK, GF
    TANNER, BK
    SPIRKL, W
    LUNN, B
    HOGG, JCH
    ASHU, P
    HAGSTON, WE
    CASTELLI, CM
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1995, 28 (4A) : A17 - A22
  • [34] Surface X-ray diffraction during GaAs/MnSb/Ga(In) As epitaxial growth
    Mousley, Philip
    Burrows, Christopher
    Sasaki, Takuo
    Takahasi, Masamitu
    Bell, Gavin
    2016 COMPOUND SEMICONDUCTOR WEEK (CSW) INCLUDES 28TH INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE & RELATED MATERIALS (IPRM) & 43RD INTERNATIONAL SYMPOSIUM ON COMPOUND SEMICONDUCTORS (ISCS), 2016,
  • [35] X-ray and γ-ray detectors based on GaAs epitaxial structures
    Ayzenshtat, GI
    Germogenov, VP
    Guschin, SM
    Okaevich, LS
    Shmakov, OG
    Tolbanov, OP
    Vorobiev, AP
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2004, 531 (1-2): : 97 - 102
  • [36] Synchrotron x-ray topography analysis of GaAs layers grown on GaAs substrates by liquid phase epitaxial lateral overgrowth
    Rantamäki, R
    Tuomi, T
    Zytkiewicz, ZR
    Dobosz, D
    McNally, PJ
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1999, 32 (10A) : A114 - A118
  • [37] In situ measurement and characterization of crystal growth by X-ray diffraction
    Quinn, Julie
    Rekhi, Sandeep
    Beckers, Detlef
    Litteer, J. Brian
    Macchiarola, Katherine
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2012, 244
  • [38] REFLECTION X-RAY TOPOGRAPHY OF GAAS DEPOSITED ON GE
    MEIERAN, ES
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (03) : 292 - &
  • [39] An evaluation of liquid phase epitaxial InGaAs/InAs heterostructures for infrared devices using synchrotron x-ray topography
    McNally, PJ
    Curley, J
    Krier, A
    Mao, Y
    Richardson, J
    Tuomi, T
    Taskinen, M
    Rantamaki, R
    Prieur, E
    Danilewsky, A
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1998, 13 (04) : 345 - 349
  • [40] Defect analysis of SiC sublimation growth by the in-situ X-ray topography
    Kato, T.
    Oyanagi, N.
    Yamaguchi, H.
    Nishizawa, S.
    Arai, K.
    Materials Science Forum, 2001, 353-356 : 295 - 298