Surface modification of Si(1 1 1) substrates with SiNx for the growth of high quality β-SiC epilayers

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Chonbuk Natl Univ, Chonju, Korea, Republic of [1 ]
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J Cryst Growth | / 4卷 / 841-848期
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Number:; -; Acronym:; KOSEF; Sponsor: Korea Science and Engineering Foundation;
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