Ion energy distributions in a pulsed plasma doping system

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[1] Radovanov, S.
[2] Godet, L.
[3] Dorai, R.
[4] Fang, Z.
[5] Koo, B.W.
[6] Cardinaud, C.
[7] Cartry, G.
[8] Lenoble, D.
[9] Grouillet, A.
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Radovanov, S. (svetlana.radovanov@vsea.com) | 1600年 / American Institute of Physics Inc.卷 / 98期
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