Ion energy distributions in a pulsed plasma doping system

被引：0
|
作者：
机构：
[1] Radovanov, S.
[2] Godet, L.
[3] Dorai, R.
[4] Fang, Z.
[5] Koo, B.W.
[6] Cardinaud, C.
[7] Cartry, G.
[8] Lenoble, D.
[9] Grouillet, A.
来源：
Radovanov, S. (svetlana.radovanov@vsea.com) | 1600年 / American Institute of Physics Inc.卷 / 98期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
18
引用
收藏
相关论文
共 50 条
  • [21] RADIATION AND ION ENERGY DISTRIBUTIONS OF THE DCX-1 PLASMA
    DUNLAP, JL
    BARNETT, CF
    DANDL, RA
    POSTMA, H
    NUCLEAR FUSION, 1962, : 233 - 237
  • [22] Ion kinetic energy distributions in laser-induced plasma
    Wang, Xiaohua
    Zhang, Shudi
    Cheng, Xiaoling
    Zhu, Eryi
    Hang, Wei
    Huang, Benli
    SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2014, 99 : 101 - 114
  • [23] Factors influencing ion energy distributions in pulsed inductively coupled argon plasmas
    Chen, Zhiying
    Longo, Roberto C.
    Hummel, Michael
    Carruth, Megan
    Blakeney, Joel
    Ventzek, Peter
    Ranjan, Alok
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2020, 53 (33)
  • [24] Time-Resolved Electron Energy Distributions and Plasma Characteristics in a Pulsed Capacitively Coupled Plasma
    Song, Sang-Heon
    Kushner, Mark J.
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2011, 39 (11) : 2542 - 2543
  • [25] ION DISTRIBUTIONS IN PULSED TOWNSEND DISCHARGE
    EDELSON, D
    MORRISON, JA
    MCAFEE, KB
    JOURNAL OF APPLIED PHYSICS, 1964, 35 (06) : 1682 - &
  • [26] ENERGY-DISTRIBUTIONS OF IONS FROM ANODE PLASMA OF A PULSED VACUUM ARC
    GRISSOM, JT
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1972, 17 (03): : 388 - +
  • [27] Time-resolved measurements of ion energy distributions in dual-mode pulsed-microwave/radio frequency plasma
    Zabeida, O
    Hallil, A
    Wertheimer, MR
    Martinu, L
    JOURNAL OF APPLIED PHYSICS, 2000, 88 (02) : 635 - 642
  • [28] Comparison of plasma doping and beamline technologies for low energy ion implantation
    Renau, A
    Scheuer, JT
    IIT2002: ION IMPLANTATION TECHNOLOGY, PROCEEDINGS, 2003, : 151 - 156
  • [29] Ion energy distributions
    Kroesen, GMW
    van de Grift, M
    Snijkers, RJMM
    de Hoog, FJ
    ADVANCED TECHNOLOGIES BASED ON WAVE AND BEAM GENERATED PLASMAS, 1999, 67 : 149 - 173
  • [30] The measurements of ion currents and ion energy distributions in the HANBIT mirror plasma heated by ICRF
    Ko, WH
    Hagisawa, K
    Kim, BC
    Kwon, M
    Park, DK
    FUSION SCIENCE AND TECHNOLOGY, 2003, 43 (1T) : 268 - 270
12345