Ion energy distributions in a pulsed plasma doping system

被引：0
|
作者：
机构：
[1] Radovanov, S.
[2] Godet, L.
[3] Dorai, R.
[4] Fang, Z.
[5] Koo, B.W.
[6] Cardinaud, C.
[7] Cartry, G.
[8] Lenoble, D.
[9] Grouillet, A.
来源：
Radovanov, S. (svetlana.radovanov@vsea.com) | 1600年 / American Institute of Physics Inc.卷 / 98期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
18
引用
收藏
相关论文
共 50 条
  • [1] Ion energy distributions in a pulsed plasma doping system
    Radovanov, S
    Godet, L
    Dorai, R
    Fang, Z
    Koo, BW
    Cardinaud, C
    Cartry, G
    Lenoble, D
    Grouillet, A
    JOURNAL OF APPLIED PHYSICS, 2005, 98 (11)
  • [2] Time evolution of ion energy distributions for plasma doping
    Agarwal, A
    Kushner, MJ
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2005, 33 (02) : 252 - 253
  • [3] Ion energy distributions in pulsed large area microwave plasma
    Zabeida, O
    Martinu, L
    JOURNAL OF APPLIED PHYSICS, 1999, 85 (09) : 6366 - 6372
  • [4] Ion energy distributions in a pulsed, electron beam-generated plasma
    Walton, SG
    Leonhardt, D
    Blackwell, DD
    Fernsler, RF
    Murphy, DP
    Meger, RA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2001, 19 (04): : 1325 - 1329
  • [5] Evolution of ion and electron energy distributions in pulsed helicon plasma discharges
    Conway, GD
    Perry, AJ
    Boswell, RW
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 1998, 7 (03): : 337 - 347
  • [6] Evolution of ion and electron energy distributions in pulsed helicon plasma discharges
    Australian Natl Univ, Canberra
    Plasma Sources Sci Technol, 3 (337-347):
  • [7] Plasma Diagnostics in Pulsed Plasma Doping System
    Varian Semiconduct. Equip. Assoc., 35 Dory Road, Gloucester, MA 01930, United States
    不详
    不详
    Plasma Science and Applications Committee of IEEE, 1600, 263 (2003):
  • [8] Study of pulsed plasma doping by Langmuir probe and ion mass-energy analyzer
    Fang, ZW
    Koo, BW
    Felch, S
    Lei, Y
    Overzet, LJ
    Goeckner, M
    IIT2002: ION IMPLANTATION TECHNOLOGY, PROCEEDINGS, 2003, : 403 - 406
  • [9] Control of ion energy distributions using a pulsed plasma with synchronous bias on a boundary electrode
    Shin, Hyungjoo
    Zhu, Weiye
    Xu, Lin
    Donnelly, Vincent M.
    Economou, Demetre J.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2011, 20 (05):
  • [10] Tailoring Ion Energy Distributions Using Pulsed Plasmas
    Agarwal, Ankur
    Rauf, Shahid
    Collins, Ken
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2011, 39 (11) : 2520 - 2521
12345