Real-time observation of ellipsometry oscillation during GaAs layer by layer growth by metalorganic vapor-phase epitaxy

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Lee, Jeong-Sik [1 ,2 ]
Sugou, Shigeo [1 ]
Masumoto, Yasuaki [1 ]
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[1] Single Quantum Dot Project, ERATO, Tsukuba Research Consortium, 5-9-9 Tokodai, Tsukuba 300-2635, Japan
[2] Optoelectronics High Frequency D., NEC Corporation, 34 Miyukigaoka, Tsukuba, Ibaraki 305-8501, Japan
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