EFFECT OF HYDROGEN IMPLANTATION ON POLYSILICON P-N JUNCTIONS.

被引：0
|
作者：
Chen, Dao-Long [1 ]
Guzman, Alberto M. [1 ]
Greve, David W. [1 ]
机构：
[1] Carnegie-Mellon Univ, Pittsburgh,, PA, USA, Carnegie-Mellon Univ, Pittsburgh, PA, USA
来源：
IEEE Transactions on Electron Devices | 1986年 / ED-33卷 / 02期
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摘要：
SEMICONDUCTOR DEVICES
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页码：270 / 274
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