EFFECT OF HYDROGEN IMPLANTATION ON POLYSILICON P-N JUNCTIONS.

被引：0

|

作者：

Chen, Dao-Long ^{[1
]}

Guzman, Alberto M. ^{[1
]}

Greve, David W. ^{[1
]}

机构：

[1] Carnegie-Mellon Univ, Pittsburgh,, PA, USA, Carnegie-Mellon Univ, Pittsburgh, PA, USA

来源：

IEEE Transactions on Electron Devices | 1986年 / ED-33卷 / 02期

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摘要：

SEMICONDUCTOR DEVICES

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页码：270 / 274

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