Vacuum annealing and in-situ XPS measurement of oxidized Sn films

被引：0
|
作者：
Yan, Hui
Ma, Lijun
Chen, Guanghua
Wong, Seiping
Man, Wahkit
Kwok, Weiman
机构：
来源：
Wuji Cailiao Xuebao/Journal of Inorganic Materials | / 13卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：65 / 70
相关论文
共 50 条
  • [21] In-situ observation of GaAs surface in high vacuum by contact angle measurement
    Matsushita, K
    Monbara, T
    Nakayama, K
    Naganuma, H
    Okuyama, S
    Okuyama, K
    ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS, 2001, 84 (11): : 51 - 59
  • [22] Fiber-optic coupling for in-situ measurement of particles in vacuum processes
    Mitchell, J
    Knollenberg, R
    Lopez, S
    Long, D
    INSTITUTE OF ENVIRONMENTAL SCIENCES 1996 PROCEEDINGS - CONTAMINATION CONTROL: SYMPOSIUM ON MINIENVIRONMENTS/42ND ANNUAL TECHNICAL MEETING - EXPANDING OUR TECHNICAL EXCELLENCE THROUGH EDUCATION, 1996, : 400 - 405
  • [23] Improvement of Electrical Properties of Sn-Doped Indium Tin Oxide by In-Situ Annealing
    Lee, Young Jae
    Kim, Jeha
    APPLIED SCIENCE AND CONVERGENCE TECHNOLOGY, 2022, 31 (06): : 156 - 160
  • [24] Team demonstrates in-situ annealing
    不详
    POWER ENGINEERING, 1996, 100 (09) : 14 - 14
  • [25] In-situ annealing demo noted
    Troutman, J
    POWER ENGINEERING, 1997, 101 (07) : 49 - 49
  • [26] XPS INVESTIGATIONS ON SOLID AND VACUUM-DEPOSITED, OXIDIZED AND NON-OXIDIZED PALLADIUM
    KINTRUP, J
    ZUCHNER, H
    ZEITSCHRIFT FUR NATURFORSCHUNG SECTION A-A JOURNAL OF PHYSICAL SCIENCES, 1995, 50 (4-5): : 381 - 387
  • [27] Development of in-situ laser vacuum annealing and sealing processes for an application to field emission displays
    Song, BG
    Cha, SN
    Park, NS
    Lee, NS
    Kim, JM
    Shin, JS
    Lee, CH
    Kim, CO
    Hong, JP
    IVMC 2000: PROCEEDINGS OF THE 14TH INTERNATIONAL VACUUM MICROELECTRONICES CONFERENCE, 2001, : 219 - 220
  • [28] CHARACTERIZATION OF TITANIUM PASSIVATION FILMS BY IN-SITU AC-IMPEDANCE MEASUREMENTS AND XPS ANALYSIS
    DAFONSECA, C
    BOUDIN, S
    BELO, MD
    JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1994, 379 (1-2) : 173 - 180
  • [29] AN IN-SITU XPS STUDY OF SPUTTER-DEPOSITED ALUMINUM THIN-FILMS ON GRAPHITE
    HINNEN, C
    IMBERT, D
    SIFFRE, JM
    MARCUS, P
    APPLIED SURFACE SCIENCE, 1994, 78 (03) : 219 - 231
  • [30] In-situ and ex-situ measurements on silicon thin films fabricated by Excimer laser annealing
    Kuo, Chil-Chyuan
    Yeh, Wen-Chang
    Lee, Ji-Feng
    Jeng, Jeng-Ywan
    4TH INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY (ISIST' 2006), 2006, 48 : 937 - 944
12345