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- [2] Structural studies of thin silicon layers repeatedly implanted by carbon ions Physics of the Solid State, 2006, 48 : 1255 - 1267
- [4] ANNEALING OF ZINC-IMPLANTED SILICON LAYERS SOVIET PHYSICS SEMICONDUCTORS-USSR, 1982, 16 (01): : 75 - 77
- [5] Annealing of silicon implanted with arsine and hydrogen ions PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 2003, 195 (02): : 396 - 400
- [6] Silicon nanocrystal formation upon annealing of SiO2 layers implanted with Si ions Semiconductors, 2002, 36 : 647 - 651
- [10] SOME FEATURES OF LASER ANNEALING OF IMPLANTED SILICON LAYERS RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 36 (3-4): : 225 - 233