ION BOMBARDMENT SECONDARY ELECTRON MAINTENANCE OF STEADY RF DISCHARGE.

被引：0
|
作者：
Godyak, V.A. [1 ]
Khanneh, A.S. [1 ]
机构：
[1] GTE Lighting Products, Danvers, MA,, USA, GTE Lighting Products, Danvers, MA, USA
来源：
IEEE Transactions on Plasma Science | 1986年 / PS-14卷 / 02期
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摘要：
24
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页码：112 / 123
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