ION BOMBARDMENT SECONDARY ELECTRON MAINTENANCE OF STEADY RF DISCHARGE.

被引：0
|
作者：
Godyak, V.A. [1 ]
Khanneh, A.S. [1 ]
机构：
[1] GTE Lighting Products, Danvers, MA,, USA, GTE Lighting Products, Danvers, MA, USA
来源：
IEEE Transactions on Plasma Science | 1986年 / PS-14卷 / 02期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
24
引用
收藏
页码：112 / 123
相关论文
共 50 条
  • [31] SECONDARY ELECTRON RESONANCE DISCHARGE .1. STEADY STATE BY DEBUNCHING
    CALLEBAUT, DK
    PHYSICA, 1963, 29 (07): : 784 - &
  • [32] SPECTRUM ANALYZER STUDY OF RF OSCILLATIONS IN AC SILENT DISCHARGE.
    MURTHY, L.C.S.
    SETTY, P.S.V.
    1982, V 20 (N 5): : 383 - 385
  • [33] SECONDARY ELECTRON RESONANCE DISCHARGE .2. STEADY STATE BY RETURN
    CALLEBAUT, DK
    VERHAEGHE, JL
    BOUTEN, MJ
    PHYSICA, 1964, 30 (04): : 825 - &
  • [34] NUMERICAL STUDY OF RF DISCHARGE CAUSED BY SECONDARY-ELECTRON EMISSION
    SAKAMOTO, K
    IKEDA, Y
    IMAI, T
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1989, 22 (12) : 1840 - 1847
  • [35] ION BOMBARDMENT OF SILICON IN A GLOW DISCHARGE
    STRACK, H
    JOURNAL OF APPLIED PHYSICS, 1963, 34 (08) : 2405 - &
  • [36] Orbital motion of dust particles in an rf magnetron discharge. Ion drag force or neutral atom wind force
    Pal, A. F.
    Ryabinkin, A. N.
    Serov, A. O.
    Dyatko, N. A.
    Starostin, A. N.
    Filippov, A. V.
    JOURNAL OF EXPERIMENTAL AND THEORETICAL PHYSICS, 2012, 114 (03) : 535 - 546
  • [37] COMPARISON OF SECONDARY-ELECTRON EMISSION DUE TO POSITRON,ELECTRON, AND POSITIVE-ION BOMBARDMENT
    PENDYALA, S
    MCGOWAN, JW
    CANADIAN JOURNAL OF PHYSICS, 1974, 52 (22) : 2215 - 2219
  • [38] Orbital motion of dust particles in an rf magnetron discharge. Ion drag force or neutral atom wind force
    A. F. Pal
    A. N. Ryabinkin
    A. O. Serov
    N. A. Dyatko
    A. N. Starostin
    A. V. Filippov
    Journal of Experimental and Theoretical Physics, 2012, 114 : 535 - 546
  • [39] NEGATIVE ION/MOLECULE REACTIONS IN A NEGATIVE CORONA DISCHARGE.
    Kotasek, Victor
    UTIAS Technical Note (University of Toronto, Institute for Aerospace Studies), 1981, (230):
  • [40] ION-BOMBARDMENT IN RF-PLASMAS
    LIU, J
    HUPPERT, GL
    SAWIN, HH
    JOURNAL OF APPLIED PHYSICS, 1990, 68 (08) : 3916 - 3934
12345