ION BOMBARDMENT SECONDARY ELECTRON MAINTENANCE OF STEADY RF DISCHARGE.

被引：0
|
作者：
Godyak, V.A. [1 ]
Khanneh, A.S. [1 ]
机构：
[1] GTE Lighting Products, Danvers, MA,, USA, GTE Lighting Products, Danvers, MA, USA
来源：
IEEE Transactions on Plasma Science | 1986年 / PS-14卷 / 02期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
24
引用
收藏
页码：112 / 123
相关论文
共 50 条
  • [21] POSITIVE-ION BOMBARDMENT OF SUBSTRATES IN rf DIODE GLOW DISCHARGE SPUTTERING.
    Coburn, J.W.
    Kay, Eric
    1600, (43):
  • [22] Role of ion bombardment in the rf-glow-discharge preparation of intrinsic amorphous silicon
    Carabe, J.
    Gandia, J.J.
    Gutierrez, M.T.
    Journal of Applied Physics, 1993, 73 (09):
  • [23] POSITIVE-ION BOMBARDMENT OF SUBSTRATES IN RF DIODE GLOW-DISCHARGE SPUTTERING
    COBURN, JW
    KAY, E
    JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) : 4965 - 4971
  • [24] INVESTIGATION OF CW ARGON-ION DISCHARGE.
    Ovsepyan, Yu.I.
    Journal of Soviet laser research, 1986, 7 (05): : 417 - 488
  • [25] Cathode ion bombardment in rf photoguns
    Pozdeyev, E.
    Kayran, D.
    Litvinenko, V. N.
    PHYSICAL REVIEW SPECIAL TOPICS-ACCELERATORS AND BEAMS, 2009, 12 (04):
  • [26] ION-BOMBARDMENT INDUCED PHOTON AND SECONDARY-ELECTRON EMISSION
    MARTEL, JG
    OLSON, NT
    NUCLEAR INSTRUMENTS & METHODS, 1972, 105 (02): : 269 - &
  • [27] ION AND ELECTRON-ENERGY ANALYSIS AT A SURFACE IN AN RF DISCHARGE
    INGRAM, SG
    BRAITHWAITE, NSJ
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1988, 21 (10) : 1496 - 1503
  • [28] KrF LASER PUMPING BY ELECTRON BEAM DISCHARGE.
    Bonnet, Jean
    Fournier, Gerard
    Pigache, Daniel
    Recherche Aerospatiale (English Edition), 1981, (02): : 3 - 7
  • [29] SECONDARY-ION PRODUCTION BY ELECTRON AND ION-BOMBARDMENT OF ALKALI-HALIDES
    POSTAWA, Z
    KOLODZIEJ, J
    CZUBA, P
    PIATKOWSKI, P
    SZYMONSKI, M
    BIELANSKA, E
    CAMRA, J
    CIACH, T
    FARYNA, M
    RAKOWSKA, A
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 78 (1-4): : 314 - 318
  • [30] ELECTRON ENERGY BALANCE IN A PULSED HELIUM DISCHARGE.
    Vagner, S.D.
    Kagan, Yu.M.
    Slyushov, A.G.
    Soviet Physics, Technical Physics (English translation of Zhurnal Tekhnicheskoi Fiziki), 1975, 20 (01): : 88 - 89
12345