ION BOMBARDMENT SECONDARY ELECTRON MAINTENANCE OF STEADY RF DISCHARGE.

被引：0

作者：

Godyak, V.A. ^{[1
]}

Khanneh, A.S. ^{[1
]}

机构：

[1] GTE Lighting Products, Danvers, MA,, USA, GTE Lighting Products, Danvers, MA, USA

来源：

IEEE Transactions on Plasma Science | 1986年 / PS-14卷 / 02期

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摘要：

引用

页码：112 / 123

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[1] ION-BOMBARDMENT SECONDARY-ELECTRON MAINTENANCE OF STEADY RF DISCHARGE
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