Cross-Sectional Observation of LSI of 4 M bit DRAM by High Resolution Transmission Electron Microscopy

被引：0
|
作者：
Song, Minghui [1 ]
Hashimoto, Hatsujiro [2 ]
Yokota, Yasuhiro [2 ]
Matsukawa, Takayuki [3 ]
Ajika, Natsuo [3 ]
Ogoh, Ikuo [3 ]
机构：
[1] Department of Metal Physics, University of Science and Technology Beijing, Beijing,100083, China
[2] Okayama University of Science, Okayama,700, Japan
[3] LS1 Research and Development Laboratory, Mitsubishi Electric Corporation, 4-1 Mizuhara, Hyogo, Itami,664, Japan
来源：
Microscopy | 1992年 / 41卷 / 05期
关键词：
22;
D O I：
10.1093/oxfordjournals.jmicro.a050976
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：337 / 349
相关论文
共 50 条
  • [41] Cross-sectional structural analysis of C60 nanowhiskers by transmission electron microscopy
    Kato, Ryoei
    Miyazawa, Kun'ichi
    DIAMOND AND RELATED MATERIALS, 2011, 20 (03) : 299 - 303
  • [42] Observations of nanoindents via cross-sectional transmission electron microscopy: a survey of deformation mechanisms
    Lloyd, SJ
    Castellero, A
    Giuliani, F
    Long, Y
    McLaughlin, KK
    Molina-Aldareguia, JM
    Stelmashenko, NA
    Vandeperre, LJ
    Clegg, WJ
    PROCEEDINGS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2005, 461 (2060): : 2521 - 2543
  • [43] CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY OF ELECTRODEPOSITED NI-P ALLOYS
    SHIMIZU, K
    THOMPSON, GE
    WOOD, GC
    KOBAYASHI, K
    PHILOSOPHICAL MAGAZINE LETTERS, 1990, 61 (02) : 43 - 48
  • [44] Transmission electron microscopy study on the cross-sectional microstructure of an ion-nitriding layer
    Xu, XL
    Wang, L
    Yu, ZW
    Hei, ZK
    METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1996, 27 (05): : 1347 - 1352
  • [45] A reliable approach to prepare brittle semiconducting materials for cross-sectional transmission electron microscopy
    Dycus, J. H.
    Lebeau, J. M.
    JOURNAL OF MICROSCOPY, 2017, 268 (03) : 225 - 229
  • [46] GDOES depth profiling analysis and cross-sectional transmission electron microscopy of a hard disk
    Shimizu, K
    Habazaki, H
    Skeldon, P
    Thompson, GE
    SURFACE AND INTERFACE ANALYSIS, 2000, 29 (12) : 887 - 890
  • [47] Characterization of heterointerfaces in thin-film transistors by cross-sectional transmission electron microscopy
    Kuroda, K
    Tsuji, S
    Hayashi, Y
    Saka, H
    ATOMIC RESOLUTION MICROSCOPY OF SURFACES AND INTERFACES, 1997, 466 : 67 - 72
  • [48] ELECTRON-SCATTERING FROM SI SURFACE AND INTERFACE BY CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY
    MIYATAKE, H
    YONEDA, M
    MURAYAMA, K
    HARADA, J
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (11): : 6406 - 6409
  • [49] The cross-sectional structure of vanadium oxide nanotubes studied by transmission electron microscopy and electron spectroscopic imaging
    Krumeich, F
    Muhr, HJ
    Niederberger, M
    Bieri, F
    Nesper, R
    ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 2000, 626 (10): : 2208 - 2216
  • [50] High resolution transmission electron microscopy of InN
    Bartel, T. P.
    Kisielowski, C.
    Specht, P.
    Shubina, T. V.
    Jmerik, V. N.
    Ivanov, S. V.
    APPLIED PHYSICS LETTERS, 2007, 91 (10)
12345