SILICON PROCESSING WITH SILICON CARBIDE FURNACE COMPONENTS.

被引：0
|
作者：
Foster, Bryan D.
Tressler, R.E.
机构：
来源：
| 1600年 / 27期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
SEMICONDUCTOR DEVICE MANUFACTURE
引用
收藏
相关论文
共 50 条
  • [21] Silicon Carbide Sand Usage in Backside Processing of Silicon Transistor Structures
    Shakhmayeva, A. R.
    Kazalieva, E.
    GLASS AND CERAMICS, 2023, 80 (5-6) : 261 - 263
  • [22] SILICON CARBIDE/SILICON AND SILICON CARBIDE/SILICON CARBIDE COMPOSITES PRODUCED BY CHEMICAL VAPOR INFILTRATION
    KMETZ, M
    SUIB, S
    GALASSO, F
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1990, 73 (10) : 3091 - 3093
  • [23] SILICON FURNACE COMPONENTS FOR MICROELECTRONIC APPLICATIONS FABRICATED FROM SHAPED SILICON TUBES
    ALIOSHIN, AA
    BLETSCAN, NI
    BOGATYRIOV, SF
    FEDORENKO, VN
    JOURNAL OF CRYSTAL GROWTH, 1990, 104 (01) : 130 - 135
  • [24] Review of Silicon Carbide Processing for Power MOSFET
    Langpoklakpam, Catherine
    Liu, An-Chen
    Chu, Kuo-Hsiung
    Hsu, Lung-Hsing
    Lee, Wen-Chung
    Chen, Shih-Chen
    Sun, Chia-Wei
    Shih, Min-Hsiung
    Lee, Kung-Yen
    Kuo, Hao-Chung
    CRYSTALS, 2022, 12 (02)
  • [25] Review of laser microscale processing of silicon carbide
    Pecholt, B.
    Gupta, S.
    Molian, P.
    JOURNAL OF LASER APPLICATIONS, 2011, 23 (01)
  • [26] Microwave Processing of Diamond–Carbide Silicon Composite
    A. S. Dolgin
    M. V. Keskinova
    S. P. Bogdanov
    M. M. Sychev
    Glass Physics and Chemistry, 2022, 48 : 664 - 668
  • [27] A Review of Femtosecond Laser Processing of Silicon Carbide
    Wang, Quanjing
    Zhang, Ru
    Chen, Qingkui
    Duan, Ran
    MICROMACHINES, 2024, 15 (05)
  • [28] IN-SITU PROCESSING OF SILICON-CARBIDE
    AHMED, S
    BARBERO, CJ
    SIGMON, TW
    COMPOUND SEMICONDUCTORS 1994, 1995, (141): : 399 - 404
  • [29] Processing and microstructure of silicon carbide fiber-reinforced silicon carbide composite by hot-pressing
    Yoshida, K
    Imai, BM
    Yano, T
    JOURNAL OF NUCLEAR MATERIALS, 1998, 258 (pt B) : 1960 - 1965
  • [30] Processing, damage tolerance and crack healing in the silicon carbide fabric-covered silicon carbide composite
    Arima, Takashi
    Hirata, Yoshihiro
    Matsunaga, Naoki
    Sameshima, Soichiro
    Shibuya, Masaki
    JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 2008, 116 (1352) : 519 - 524
12345