SILICON PROCESSING WITH SILICON CARBIDE FURNACE COMPONENTS.

被引:0
|
作者
Foster, Bryan D.
Tressler, R.E.
机构
来源
| 1600年 / 27期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
SEMICONDUCTOR DEVICE MANUFACTURE
引用
收藏
相关论文
共 50 条
  • [31] Silicon carbide platelet/silicon carbide composites
    Mitchell Jr., Tyrone
    De Jonghe, Lutgard C.
    MoberlyChan, Warren J.
    Ritchie, Robert O.
    Journal of the American Ceramic Society, 1995, 78 (01): : 97 - 103
  • [32] INVESTIGATION ON SYNTHESIS OF SILICON-CARBIDE IN ACHESON RESISTANCE FURNACE
    OWCZAREK, Z
    WOZNIAK, K
    PRZEMYSL CHEMICZNY, 1972, 51 (04): : 237 - &
  • [33] SILICON-CARBIDE REFRACTORIES FOR BLAST-FURNACE LINING
    HALM, L
    REVUE DE METALLURGIE-CAHIERS D INFORMATIONS TECHNIQUES, 1980, 77 (02): : 121 - 132
  • [34] CONVERSION TO SILICON-CARBIDE HEATING ELEMENTS IN FURNACE APPLICATIONS
    SBERT, RS
    AMERICAN CERAMIC SOCIETY BULLETIN, 1974, 53 (04): : 373 - 373
  • [35] Metallurgical Silicon Carbide in the Electric Induction Furnace and Cupola.
    Benecke, Theodor
    Giesserei, 1981, 68 (12): : 344 - 349
  • [36] Simulation and Optimization on Silicon Carbide Synthesis Furnace Power Curve
    Li, Yonggang
    Hu, Yangdong
    Sun, Qinhe
    Wu, Lianying
    APPLICATION OF CHEMICAL ENGINEERING, PTS 1-3, 2011, 236-238 : 1497 - 1504
  • [37] Atmosphere Effects in the Processing of Silicon Carbide and Silicon Oxycarbide Thin Films and Coatings
    Colombo, P.
    Paulson, T. E.
    Pantano, C. G.
    JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1994, 2 (1-3) : 601 - 604
  • [38] Silicon carbide whisker stability during processing of silicon nitride matrix composites
    Bradley, S.A., 1600, Pharmacotherapy Publications Inc. (72):
  • [39] Optimisation of the processing of a silicon oxynitride-zirconia bonded silicon carbide refractory
    Wood, CA
    Swenser, SP
    Cheng, YB
    PROCESSING AND FABRICATION OF ADVANCED MATERIALS VI, VOLS 1 & 2, 1998, : 753 - 761
  • [40] Low-Temperature Processing of Silicon Oxycarbide-Bonded Silicon Carbide
    Eom, Jung-Hye
    Kim, Young-Wook
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2010, 93 (09) : 2463 - 2466