Development of a Nonresonant Photoacoustic Gas Sensor for Ozone Detection

被引：0
|
作者：
Xu, Maosen [1 ,2 ,3 ]
Liu, Li [3 ]
Tian, Wei [3 ]
Xu, Yan [1 ,2 ]
Tao, Jifang [3 ]
机构：
[1] Shandong Univ Sci & Technol, Coll Elect Engn & Automat, Qingdao 266590, Peoples R China
[2] Shandong Univ Sci & Technol, Coll Elect & Informat Engn, Qingdao 266590, Peoples R China
[3] Shandong Univ, Sch Informat Sci & Engn ISE, Qingdao 266237, Peoples R China
来源：
IEEE SENSORS JOURNAL | 2024年 / 24卷 / 21期
关键词：
Micro-electromechanical system (MEMS) emitter; O-3; sensor; photoacoustic (PA) sensor; semiconductor;
D O I：
10.1109/JSEN.2024.3459898
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A nonresonant photoacoustic (PA) effect-based ozone (O-3) gas sensor has been developed, with the potential for O-3 concentration monitoring in various fields, including the semiconductor industry, water treatment, and O-3 environmental science research. This sensor comprises a micro-electromechanical system (MEMS) emitter, a miniature PA cell, a MEMS microphone, and a circuit. By establishing a 3-D model and simulating the impact of structural parameters on sensor performance, this comprehensive approach successfully determined the optimal structural parameters. The sensor has a footprint of approximately 12 x 12 x 5 mm (L x W x H), which is 10% of the size of traditional nondispersive infrared gas sensors. The sensor achieves an accuracy of +/- 50 ppm within an O-3 concentration range of 0%-4%. The response time (t(100)) is 57 s, and the limit of detection (LOD) for O-3 concentration is 36 ppm.
引用
收藏
页码：35508 / 35515
页数：8
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