Development of a Nonresonant Photoacoustic Gas Sensor for Ozone Detection

被引：0
|
作者：
Xu, Maosen [1 ,2 ,3 ]
Liu, Li [3 ]
Tian, Wei [3 ]
Xu, Yan [1 ,2 ]
Tao, Jifang [3 ]
机构：
[1] Shandong Univ Sci & Technol, Coll Elect Engn & Automat, Qingdao 266590, Peoples R China
[2] Shandong Univ Sci & Technol, Coll Elect & Informat Engn, Qingdao 266590, Peoples R China
[3] Shandong Univ, Sch Informat Sci & Engn ISE, Qingdao 266237, Peoples R China
来源：
IEEE SENSORS JOURNAL | 2024年 / 24卷 / 21期
关键词：
Micro-electromechanical system (MEMS) emitter; O-3; sensor; photoacoustic (PA) sensor; semiconductor;
D O I：
10.1109/JSEN.2024.3459898
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A nonresonant photoacoustic (PA) effect-based ozone (O-3) gas sensor has been developed, with the potential for O-3 concentration monitoring in various fields, including the semiconductor industry, water treatment, and O-3 environmental science research. This sensor comprises a micro-electromechanical system (MEMS) emitter, a miniature PA cell, a MEMS microphone, and a circuit. By establishing a 3-D model and simulating the impact of structural parameters on sensor performance, this comprehensive approach successfully determined the optimal structural parameters. The sensor has a footprint of approximately 12 x 12 x 5 mm (L x W x H), which is 10% of the size of traditional nondispersive infrared gas sensors. The sensor achieves an accuracy of +/- 50 ppm within an O-3 concentration range of 0%-4%. The response time (t(100)) is 57 s, and the limit of detection (LOD) for O-3 concentration is 36 ppm.
引用
收藏
页码：35508 / 35515
页数：8
相关论文
共 50 条
  • [31] Differential Cantilever Enhanced Fiber-Optic Photoacoustic Sensor for Diffusion Gas Detection
    Li, Chenxi
    Zhang, Yajie
    Guo, Min
    Qi, Hongchao
    Zhao, Xinyu
    Chen, Ke
    ANALYTICAL CHEMISTRY, 2024, 96 (11) : 4562 - 4569
  • [32] DEPENDENCE OF AN ACOUSTICALLY NONRESONANT INTRACAVITY PHOTOACOUSTIC SIGNAL ON SAMPLE AND BUFFER GAS-PRESSURE
    SCHATTKA, BJ
    TURNBULL, DM
    KJAERGAARD, HG
    HENRY, BR
    JOURNAL OF PHYSICAL CHEMISTRY, 1995, 99 (17): : 6327 - 6332
  • [33] Research on the selection and layout of the cantilever sensor based on photoacoustic spectroscopy gas detection technology
    Cheng, Hongtu
    Zhang, Xiaoxing
    Tang, Ju
    Xiao, Song
    Mao, Shiyi
    Wang, Dibo
    Zhuo, Ran
    ENGINEERING RESEARCH EXPRESS, 2021, 3 (02):
  • [34] A Fiber-Coupled Quartz-Enhanced Photoacoustic Sensor for Dissolved Gas Detection
    Zhao, Huiyuan
    Zhang, Hui
    Hu, Mengpeng
    Hu, Mai
    Zhou, Yan
    Liang, Jingqiu
    Wang, Qiang
    PHOTONICS, 2023, 10 (02)
  • [35] Advanced Quartz-Enhanced Photoacoustic Trace Gas Sensor for Early Fire Detection
    Kosterev, A. A.
    Tittel, F. K.
    Bearman, G.
    SAE INTERNATIONAL JOURNAL OF AEROSPACE, 2009, 1 (01): : 331 - 336
  • [36] Quantum Cascade Laser-Based Photoacoustic Sensor for Trace Detection of Formaldehyde Gas
    Elia, Angela
    Di Franco, Cinzia
    Spagnolo, Vincenzo
    Lugara, Pietro Mario
    Scamarcio, Gaetano
    SENSORS, 2009, 9 (04) : 2697 - 2705
  • [37] Gas detection with quantum cascade lasers: An adapted photoacoustic sensor based on Helmholtz resonance
    Barbieri, S
    Pellaux, JP
    Studemann, E
    Rosset, D
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2002, 73 (06): : 2458 - 2461
  • [38] Development of a MEMS-Scale Photoacoustic Chemical Sensor for Trace Vapor Detection
    Holthoff, Ellen L.
    Pellegrino, Paul M.
    CHEMICAL, BIOLOGICAL, RADIOLOGICAL, NUCLEAR, AND EXPLOSIVES (CBRNE) SENSING X, 2009, 7304
  • [39] Development of a photoacoustic gas sensor for in situ and on-line measurement of gaseous water and toluene
    Beenen, A
    Niessen, R
    ANALYST, 1998, 123 (04) : 543 - 545
  • [40] Photoacoustic gas detection for fire warning
    Nebiker, PW
    Pleisch, RE
    FIRE SAFETY JOURNAL, 2001, 36 (02) : 173 - 180
12345