Characterization of SiC MOS structures using conductance spectroscopy and capacitance voltage analysis

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作者：
Sveinbjörnsson, E.O?. [1 ]
Ahnoff, M. [1 ]
Ólafsson, H.O?. [1 ]
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[1] Microtechnology Ctr. Chalmers S., Chalmers University of Technology, Department of Microelectronics, SE-412 96 Göteborg, Sweden
来源：
Materials Science Forum | 2000年 / 338卷
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