Electroluminescence of Si, Ge and Ar ion-implanted Si-rich SiO2

被引：0
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作者：
Wang, Yanbing [1 ]
Sun, Yongke [1 ]
Qiao, Yongping [1 ]
Zhang, Borui [1 ]
Qin, Guogang [1 ]
Chen, Wentai [1 ]
Gong, Yiyuan [1 ]
Wu, Dexin [1 ]
Ma, Zhenchang [1 ]
Zong, Wanhua [1 ]
机构：
[1] Peking Univ, Beijing, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2000年 / 21卷 / 07期
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页码：667 / 672
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